microelectromechanical systems

Microelectromechanical systems (MEMS) are miniaturised electromechanical systems made using processes of microfabrication. MEMS consist of microsensors, microactuators, microstructures, and microelectronics. MEMS can be used in a range of appliances, such as ink jet printer heads, digital light processors, gyroscopes in smart phones, accelerometers for airbags, and miniature microphones.

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